Floating polishing method

The ultra precision flat floating polishing machine adopts hydrostatic bearings and is equipped with an ultra precision diamond vertical polishing disc trimmer on the table. The polishing machine should be placed on an ultra clean workbench in a clean room with air conditioning, and polished at a cleanliness level of 100.

Pure water or distilled water is used as the processing fluid, and SiO ₂ ultrafine particles with a nominal diameter of 7nm are used as polishing agents (with a mass fraction of 2% to 3%). When polishing, immerse the surface of the polishing disc in the polishing solution. Surface roughness Rz1.0 μ Place workpieces with a flatness of micrometers or less on the polishing disc and rotate them at high speed. By using the dynamic pressure fluid lubrication state of the polishing fluid between the two, the workpiece is suspended on the polishing disc for polishing

When floating polishing, due to the fact that the workpiece only floats a few micrometers, when the surface roughness Rz of the pre processed workpiece is a few micrometers, a liquid film cannot be established between the workpiece and the polishing disc, and it will damage the polishing disc and prevent suspension polishing. Floating polishing also requires a good flatness of the workpiece. The polishing machine has no axial vibration. To prevent contact between the workpiece and the tin polishing disc, it is also necessary to add a tackifier to the polishing solution. Therefore, the workpiece cannot be directly moved from rough or intermediate processing to final floating polishing processing. Floating polishing requires the workpiece to undergo precision polishing in the previous process, and the machined surface roughness should not exceed 35nm.

Due to the high rigidity of tin polishing discs and the high polishing pressure during processing, the rigidity of the polishing liquid film with a thickness of several micrometers between the workpiece and the polishing disc is also high. The workpiece does not directly come into contact with the tin plate, so the tin plate wears very little during the polishing process, making it easier to maintain flatness than other polishing methods. In addition, due to the homogenization effect of dynamic pressure liquid, the flatness of the workpiece surface is higher than that of the tin plate. Even if there is a slight unevenness on the surface of the tin plate, it will not be directly "copied" to the surface of the workpiece. To maintain smooth rotation during processing, the polishing pressure used is only the self weight of the workpiece and workpiece fixture, and no external force is required.

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